Reactive ion etching

Properties of self-assembled ZnO nanostructures

Semiconductor Manufacturing / Self Assembly / Nanoparticles / Transmission Electron Microscopy / Nanotechnology / Polymer Blends / Semiconductor / Si / TEM / Solid State electronics / Temperature / XPS / Particle Size / Size Distribution / Room Temperature / Fourier transform infrared spectroscopy / Photoemission / Reactive ion etching / Wide Band Gap Semiconductors / Metallization / Electrical And Electronic Engineering / Fourier transform infrared / Polymer Blends / Semiconductor / Si / TEM / Solid State electronics / Temperature / XPS / Particle Size / Size Distribution / Room Temperature / Fourier transform infrared spectroscopy / Photoemission / Reactive ion etching / Wide Band Gap Semiconductors / Metallization / Electrical And Electronic Engineering / Fourier transform infrared

High-speed, high-accuracy optical measurements of polycrystalline silicon for process control

Engineering / Technology / Scattering Theory / Physical sciences / Feedback Control / Spectroscopic Ellipsometry / Thin Solid Films / Reactive ion etching / Polycrystalline Silicon / Film Thickness / Spectroscopic Ellipsometry / Thin Solid Films / Reactive ion etching / Polycrystalline Silicon / Film Thickness

Novel nanostructure architectures

Materials Engineering / Self Assembly / Nanotechnology / Molecular beam epitaxy / Quantum Dot / Reactive ion etching

A six-wafer combustion system for a silicon micro gas turbine engine

Packaging / Combustion / Microelectromechanical systems / Air flow / Fuel / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer

Nanosized Magnetite Particle Assemblages Produced by Electron Beam Lithography

Rock magnetism / Electron Beam Lithography / Thin Film / Magnetic Properties / Grain size / Experimental Study / Mineral Composition / Particle Size / Reactive ion etching / Interactive Display / Instruments and Techniques / Experimental Study / Mineral Composition / Particle Size / Reactive ion etching / Interactive Display / Instruments and Techniques

A fast-response microfluidic gas concentrating device for environmental sensing

Materials Engineering / Mechanical Engineering / Computational Fluid Dynamics / MEMS / Numerical Simulation / Real Time / Reactive ion etching / Molecular weight / Electrical And Electronic Engineering / Real Time / Reactive ion etching / Molecular weight / Electrical And Electronic Engineering

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